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Proceedings Paper

Design and characterization of a gas actuated pump for µTAS
Author(s): Xiuhan Li; Xiaomei Yu
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Paper Abstract

We present the results on the design, simulation, fabrication, and characterization of a gas-actuated micro-jet pump for integrated micro-fluidic systems. Vacuum suction mode provided by the pump can effectively decrease the formation of air bubbles and overcome the interface tension between the liquid and the solid wall in the micro-fluidic systems. Structurally the pump, which can be fabricated with only one etching step, consists of a nozzle, a diffuser, two suction tubes, a throat pipe, and a suction chamber. To optimize the parameters for the future designs, various pump configurations with different geometries were simulated through FLUENT software firstly. Then, the characteristics of the gas-actuated micro-jet pumps were studied experimentally. The pump began to work at a pressure of 2kPa, and the actuation pressure could be easily realized through a medical syringe.

Paper Details

Date Published: 20 November 2009
PDF: 8 pages
Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 75100M (20 November 2009); doi: 10.1117/12.845914
Show Author Affiliations
Xiuhan Li, Peking Univ. (China)
Beijing Jiaotong Univ. (China)
Xiaomei Yu, Peking Univ. (China)


Published in SPIE Proceedings Vol. 7510:
2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
Zhaoying Zhou; Toshio Fukuda; Helmut Seidel; Xinxin Li; Haixia Zhang; Tianhong Cui, Editor(s)

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