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Proceedings Paper

Tunable RF MEMS capacitor for wireless communication
Author(s): Xiuhan Li; Yu Xia; Jian Liu; Li Yin; Yu Liu; Dongming Fang; Haixia Zhang
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Paper Abstract

High quality tunable MEMS parallel plate capacitors have been widely used in phase shifters, oscillators and tunable filters for wireless communication. As electrostatic actuation and air dielectrics have led to devices with low power consumption and high quality factors, an electrostatically actuated MEMS tunable capacitor with two flexible plates have been designed and fabricated in this paper. According to the measurement results, tunable capacitor shows good performance in the frequency range of 2GHz-10GHz. The pull-in voltage for the capacitor is 13 V. The tuning ratio of the capacitor is very high, which can reach 320%.

Paper Details

Date Published: 25 November 2009
PDF: 9 pages
Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 751002 (25 November 2009); doi: 10.1117/12.845903
Show Author Affiliations
Xiuhan Li, Beijing Jiaotong Univ. (China)
Yu Xia, Peking Univ. (China)
Jian Liu, Peking Univ. (China)
Li Yin, Beijing Jiaotong Univ. (China)
Yu Liu, Peking Univ. (China)
Dongming Fang, Peking Univ. (China)
Haixia Zhang, Peking Univ. (China)


Published in SPIE Proceedings Vol. 7510:
2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
Zhaoying Zhou; Toshio Fukuda; Helmut Seidel; Xinxin Li; Haixia Zhang; Tianhong Cui, Editor(s)

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