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Fabrication of dielectric and metallo-dielectric 3D nanostructures by direct laser writing and electroless plating
Author(s): André Radke; Frank Wolff; Harald Giessen; Thomas Klotzbücher
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Paper Abstract

Direct laser writing via two-photon absorption allows the fabrication of three-dimensional dielectric structures with submicron resolution by tightly focusing ultrashort laser pulses into a photo-sensitive material with a high-resolution microscope objective and scanning the laser focus relative to the material. Woodpile photonic crystals fabricated with this method show a characteristic dip in transmission at near-infrared wavelengths. The spectral position of this transmission dip scales with the grating period of the fabricated crystals. Metallo-dielectric structures can be obtained by first fabricating dielectric templates with direct laser writing and subsequently coating the templates with a thin conformal metal film by electroless plating. Contiguous and conducting silver films can be deposited even on convoluted 3D geometries.

Paper Details

Date Published: 23 February 2010
PDF: 6 pages
Proc. SPIE 7585, Laser-based Micro- and Nanopackaging and Assembly IV, 75850M (23 February 2010); doi: 10.1117/12.845474
Show Author Affiliations
André Radke, Institut für Mikrotechnik Mainz GmbH (Germany)
Univ. Stuttgart (Germany)
Frank Wolff, Institut für Mikrotechnik Mainz GmbH (Germany)
Harald Giessen, Univ. Stuttgart (Germany)
Thomas Klotzbücher, Institut für Mikrotechnik Mainz GmbH (Germany)

Published in SPIE Proceedings Vol. 7585:
Laser-based Micro- and Nanopackaging and Assembly IV
Wilhelm Pfleging; Yongfeng Lu; Kunihiko Washio; Jun Amako; Willem Hoving, Editor(s)

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