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Proceedings Paper

Manufacturability of 850nm data communication VCSELs in high volume
Author(s): Terry E. Sale; Chen Chu; Jeong-Ki Hwang; Gim-Hong Koh; Rashit Nabiev; Jason L.-C. Tan; Laura M. Giovane; Ramana M. V. Murty
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Paper Abstract

Frequently quoted advantages of VCSELs over other optical sources include wafer scale fabrication and testing, low cost, ease of fabricating arrays and ease of fiber coupling. To benefit from these advantages a robust manufacturing process and product demand are needed. Avago Technologies produces a range of single channel and parallel optical link products incorporating 850nm band VCSEL sources operating at up to 10Gb/s per channel. This paper will explore some important factors which need to be controlled for manufacturability of VCSEL devices.

Paper Details

Date Published: 5 February 2010
PDF: 10 pages
Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 761503 (5 February 2010); doi: 10.1117/12.845077
Show Author Affiliations
Terry E. Sale, Avago Technologies (Singapore)
Chen Chu, Avago Technologies (Singapore)
Jeong-Ki Hwang, Avago Technologies (Singapore)
Gim-Hong Koh, Avago Technologies (Singapore)
Rashit Nabiev, Avago Technologies (Singapore)
Jason L.-C. Tan, Avago Technologies (Singapore)
Laura M. Giovane, Avago Technologies (United States)
Ramana M. V. Murty, Avago Technologies (United States)

Published in SPIE Proceedings Vol. 7615:
Vertical-Cavity Surface-Emitting Lasers XIV
James K. Guenter; Kent D. Choquette, Editor(s)

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