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Proceedings Paper

Optical bus waveguide metallic hard mold fabrication with opposite 45º micro-mirrors
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Paper Abstract

In this paper, 3-to-3 metallic hard mold for optical bus waveguide with opposite 45° micro-mirrors was successfully fabricated using electroplating method. The optical bus waveguide pre-mold with 45° surfaces before electroplating was prepared using photopolymer SU-8 through tilted exposure process under de-ionized water. Metal nickel was electroplated into SU-8 defined bus waveguide trenches. The 45° slant angles can be well controlled through titled exposure, which have deviations of 0.15° and 0.27° for SU-8 pre-mold and Ni hard mold, respectively. This metallic hard mold provides a convenient way to fabricate the polymeric optical bus waveguide devices through imprint technique.

Paper Details

Date Published: 23 February 2010
PDF: 6 pages
Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070P (23 February 2010); doi: 10.1117/12.844486
Show Author Affiliations
Xinyuan Dou, The Univ. of Texas at Austin (United States)
Alan Xiaolong Wang, Omega Optics, Inc. (United States)
Xiaohui Lin, The Univ. of Texas at Austin (United States)
Haiyu Huang, The Univ. of Texas at Austin (United States)
Ray T. Chen, The Univ. of Texas at Austin (United States)


Published in SPIE Proceedings Vol. 7607:
Optoelectronic Interconnects and Component Integration IX
Alexei L. Glebov; Ray T. Chen, Editor(s)

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