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Proceedings Paper

MEMS deformable mirrors for focus control in vital microscopy
Author(s): B. Jeffrey Lutzenburger; Mohammad J. Moghimi; Sarah J. Lukes; Brant Kaylor; David L. Dickensheets
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Paper Abstract

This paper describes deformable membrane mirrors designed for focus control and aberration compensation in vital microscopy and shows microscope images obtained using these mirrors. The mirrors are metalized polymer membranes ranging from 1-3 mm in diameter using the photo-cured epoxy SU-8 2002, constructed using a die-bonding process. They are electrostatically actuated using three concentric electrodes to provide large displacement while minimizing spherical aberration.

Paper Details

Date Published: 16 February 2010
PDF: 8 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759406 (16 February 2010); doi: 10.1117/12.843874
Show Author Affiliations
B. Jeffrey Lutzenburger, Montana State Univ. (United States)
Mohammad J. Moghimi, Montana State Univ. (United States)
Sarah J. Lukes, Montana State Univ. (United States)
Brant Kaylor, Bridger Photonics, Inc. (United States)
David L. Dickensheets, Montana State Univ. (United States)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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