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Proceedings Paper

Characterization of polymeric getter materials for MEMS/MOEMS and other microelectronic package service
Author(s): Richard C. Kullberg; Bradley L. Phillip
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Paper Abstract

Various getter materials have been developed over the years to deal with hydrogen and moisture caused problems in MEMS/MOEMS packages. These materials consist of two major families, metal alloy systems and polymeric systems. Both systems have pluses and minuses for the MEMS/MOEMS packaging engineer. In order to determine applicability, careful characterization of these systems is critical. The advent of a new class of polymeric getter materials originally developed for other industries has brought a need to readdress the issue of how to characterize such materials for MEMS/MOEMS service. While MIL-STD-883 gives a degree of guidance, it is not the complete answer. Characterization of these materials has consequently been clean sheeted to address the key areas of hydrogen and water capacity determination, and determination of ionics concentrations. Methods used and the results of this work will be discussed.

Paper Details

Date Published: 4 February 2010
PDF: 5 pages
Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 759206 (4 February 2010); doi: 10.1117/12.843859
Show Author Affiliations
Richard C. Kullberg, Vacuum Energy, Inc. (United States)
Bradley L. Phillip, Vacuum Energy, Inc. (United States)


Published in SPIE Proceedings Vol. 7592:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
Richard C. Kullberg; Rajeshuni Ramesham, Editor(s)

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