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Proceedings Paper

Study on microchannel fabrication technology by femtosecond laser micromachining in transparent materials
Author(s): Rongrong Xu; Deming Liu; Guohua Liu; Feng Cao
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Paper Abstract

Microchannels are fabricated into transparent materials usually have two different methods, the first method is using tight focused femtosecond laser processing and chemical etching, and in the other method, many laser-produced voids are linked together to form a hollow channel, whereas both methods of channel fabrication is relatively slow, a novel method of parallel processing channels have been demonstrated based on the self-focusing formation theory. In addition, It provides a theoretical basis for the further study on the microchannel fabricating of femtosecond laser.

Paper Details

Date Published: 21 October 2009
PDF: 9 pages
Proc. SPIE 7515, Photonics and Optoelectronics Meetings (POEM) 2009: Industry Lasers and Applications, 75150M (21 October 2009); doi: 10.1117/12.843479
Show Author Affiliations
Rongrong Xu, Huazhong Univ. of Science and Technology (China)
Deming Liu, Huazhong Univ. of Science and Technology (China)
Guohua Liu, Wuhan Institute of Technology (China)
Feng Cao, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7515:
Photonics and Optoelectronics Meetings (POEM) 2009: Industry Lasers and Applications
Dianyuan Fan; Horst Weber; Xiao Zhu; Dongsheng Jiang; Xiaochun Xiao; Weiwei Dong; Desheng Xu, Editor(s)

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