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Proceedings Paper

Recent advances in expanding the spectral range of MEMS Fabry-Perot filters
Author(s): Martin Ebermann; Norbert Neumann; Karla Hiller; Elvira Gittler; Marco Meinig; Steffen Kurth
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Paper Abstract

First results of a MEMS Fabry-Perot filter (FPF) for the spectral range of 8-11 μm are presented. Broad bandwidth and a low phase dispersion could be achieved by using new dielectric materials with an enhanced refractive index contrast and relatively simple reflector designs with a low number of layers. Different designs of the Bragg reflectors and complete FPF devices have been developed and samples have been fabricated and tested. Especially tilting and in certain cases bowing of the reflectors lowers the finesse of the fabricated filters. The bandwidth of the FPF is in the range of 170- 250 nm and the peak transmittance has been determined to be up to 60 %. Simulation and measurements agree very well if the effect of the defective finesse is taken into considerations.

Paper Details

Date Published: 17 February 2010
PDF: 10 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940V (17 February 2010); doi: 10.1117/12.843441
Show Author Affiliations
Martin Ebermann, Infratec GmbH (Germany)
Norbert Neumann, Infratec GmbH (Germany)
Karla Hiller, Chemnitz Univ. of Technology (Germany)
Elvira Gittler, JENOPTIK Laser, Optik, Systeme GmbH (Germany)
Marco Meinig, Fraunhofer ENAS (Germany)
Steffen Kurth, Fraunhofer ENAS (Germany)

Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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