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Proceedings Paper

Field-emission SEM characterization of novel ZnO thin films grown by magnetron sputtering on the different substrates
Author(s): Tangchao Peng; Xiangheng Xiao; Changzhong Jiang
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Paper Abstract

Zinc oxide is a direct, wide bandgap semiconductor material with many promising properties for blue/UV optoelectronics, transparent electronics, spintronic devices and sensor applications. In this work, zinc oxide films were deposited by RF magnetron sputtering on different substrates. The images of field-emission SEM are used to analyse the structures of the samples, and some novel structures of the ZnO thin films grown on quartz glass and normal glass substrate are found. The x-ray diffraction is used to analyse the grain structure of these samples, it is shown that films grow mainly with the hexagonal c-axis perpendicular to the substrate surface.

Paper Details

Date Published: 12 October 2009
PDF: 4 pages
Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 75180C (12 October 2009); doi: 10.1117/12.843429
Show Author Affiliations
Tangchao Peng, Wuhan Univ. (China)
Xiangheng Xiao, Wuhan Univ. (China)
Changzhong Jiang, Wuhan Univ. (China)


Published in SPIE Proceedings Vol. 7518:
Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies
Michael Grätzel; Hiroshi Amano; Chin Hsin Chen; Changqing Chen; Peng Wang, Editor(s)

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