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Proceedings Paper

CO2 laser-cleaning of dimethylsilicone contamination on the surface of gold films
Author(s): Yayun Ye; Xiaodong Yuan; Xia Xiang; Meng Chen; Xinxiang Miao; Haibing Lv; Haijung Wang; Chengcheng Wang; Wanguo Zheng
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Paper Abstract

As a non-contact cleaning method, laser cleaning can effectively remove particulate contaminations of sizes as small as 0.1 μm without damage to the optics. In this work, 10.6 μm CO2 laser was utilized to clean the dimethylsilicone oil contaminated on the surface of the gold-coated K9 glass. The dimethylsilicone oil contaminants with different degree were obtained by 10-30 minutes of vapor condensation. Single point irradiation mode was used to study the removal of the dimethylsilicone oil. The cleaning different degree of contaminations was investigated at the variable laser parameters, including laser power, laser frequency, and irradiation time. Optical microscope was used to analyze the cleaning effect. The results show that CO2 laser can effectively remove the dimethylsilicone oil. On the premise that the gold-coated K9 glasses are not damaged, the cleaning area increases with the increase of radiation time and laser power. The cleaning area doesn't change much with the variation of laser frequency when the other parameters are the same. In addition, at the same laser parameters, the cleaning area increases as contamination degree increases.

Paper Details

Date Published: 21 October 2009
PDF: 6 pages
Proc. SPIE 7515, Photonics and Optoelectronics Meetings (POEM) 2009: Industry Lasers and Applications, 751504 (21 October 2009); doi: 10.1117/12.843164
Show Author Affiliations
Yayun Ye, China Academy of Engineering Physics (China)
Xiaodong Yuan, China Academy of Engineering Physics (China)
Xia Xiang, China Academy of Engineering Physics (China)
Meng Chen, China Academy of Engineering Physics (China)
Xinxiang Miao, China Academy of Engineering Physics (China)
Haibing Lv, China Academy of Engineering Physics (China)
Haijung Wang, China Academy of Engineering Physics (China)
Chengcheng Wang, China Academy of Engineering Physics (China)
Wanguo Zheng, China Academy of Engineering Physics (China)


Published in SPIE Proceedings Vol. 7515:
Photonics and Optoelectronics Meetings (POEM) 2009: Industry Lasers and Applications
Dianyuan Fan; Horst Weber; Xiao Zhu; Dongsheng Jiang; Xiaochun Xiao; Weiwei Dong; Desheng Xu, Editor(s)

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