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Proceedings Paper

High-throughput three-dimensional (3D) lithographic microfabrication in biomedical applications
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Paper Abstract

Two-photon excitation microfabrication has been shown to be useful in the field of photonics and biomedicine. It generates 3D microstructures and provides sub-diffraction fabrication resolution. Nevertheless, laser direct writing, the most popular two-photon fabrication technique, has slow fabrication speed, and its applications are limited to prototyping. In this proceeding, we propose high-throughput 3D lithographic microfabrication system based on depthresolved wide-field illumination and build several 3D microstructures with SU-8. Through these fabrications, 3D lithographic microfabrication has scalable function and high-throughput capability. It also has the potential for fabricating 3D microstructure in biomedical applications, such as intertwining channels in 3D microfluidic devices for biomedical analysis and 3D cell patterning in the tissue scaffolds.

Paper Details

Date Published: 26 February 2010
PDF: 5 pages
Proc. SPIE 7569, Multiphoton Microscopy in the Biomedical Sciences X, 75691V (26 February 2010); doi: 10.1117/12.843160
Show Author Affiliations
Daekeun Kim, Massachusetts Institute of Technology (United States)
Peter T. C. So, Massachusetts Institute of Technology (United States)


Published in SPIE Proceedings Vol. 7569:
Multiphoton Microscopy in the Biomedical Sciences X
Ammasi Periasamy; Peter T. C. So; Karsten König, Editor(s)

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