Share Email Print
cover

Proceedings Paper

High-resolution x-ray diffraction studies of highly curved GaN layers prepared by hydride vapor phase epitaxy
Author(s): J. Q. Liu; Y. X. Qiu; J. F. Wang; X. Guo; K. Huang; K. Xu; H. Yang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

In addition to dislocations, the wafer curvature can also affect the broadening of x-ray rocking curve (XRC) peaks and it may deteriorate the accuracy of the tilt and twist angle measurements. In this paper, the radial-distribution of curvature and the effects of wafer curvature on XRC of highly curved (the radius curvature of r less than 2.5 m) GaN layers were studied. Curvature-related effects both on symmetric geometry and on the (102) skew symmetric geometry were studied by the use of adjustable beam slits and 'antis.slit' placed before the sample and before the detector, respectively. The acceptable approaches to minimize the curvature-related effects in determination of a reliable tilt or twist angle were proposed. It is found that the curvature-related effects can be eliminated by the use of the methods we proposed. The dislocation densities obtained by high resolution x-ray diffraction (HRXRD) are fairly consistent with that obtained by cathodoluminescence (CL) and atomic force microscope (AFM).

Paper Details

Date Published: 12 October 2009
PDF: 8 pages
Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 75180G (12 October 2009); doi: 10.1117/12.843108
Show Author Affiliations
J. Q. Liu, Suzhou Institute of Nano-Tech and Nano-Bionics (China)
Institute of Semiconductors (China)
Graduate Univ. of Chinese Academy of Sciences (China)
Y. X. Qiu, Suzhou Institute of Nano-Tech and Nano-Bionics (China)
J. F. Wang, Suzhou Institute of Nano-Tech and Nano-Bionics (China)
X. Guo, Institute of Semiconductors (China)
K. Huang, Suzhou Institute of Nano-Tech and Nano-Bionics (China)
K. Xu, Suzhou Institute of Nano-Tech and Nano-Bionics (China)
H. Yang, Suzhou Institute of Nano-Tech and Nano-Bionics (China)


Published in SPIE Proceedings Vol. 7518:
Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies
Michael Grätzel; Hiroshi Amano; Chin Hsin Chen; Changqing Chen; Peng Wang, Editor(s)

© SPIE. Terms of Use
Back to Top