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Proceedings Paper

Nonlinear mathematical model for a biaxial MOEMS scanning mirror
Author(s): Yunfei Ma; Wyatt O. Davis; Matt Ellis; Dean Brown
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Paper Abstract

In this paper, a nonlinear mathematic model for Microvision's MOEMS scanning mirror is presented. The pixel placement accuracy requirement for scanned laser spot displays translates into a roughly 80dB signal to noise ratio, noise being a departure from the ideal trajectory. To provide a tool for understanding subtle nonidealities, a detailed nonlinear mathematical model is derived, using coefficients derived from physics, finite element analysis, and experiments. Twelve degrees of freedom parameterize the motion of a gimbal plate and a suspended micromirror; a thirteenth is the device temperature. Illustrations of the application of the model to capture subtleties about the device dynamics and transfer functions are presented.

Paper Details

Date Published: 17 February 2010
PDF: 11 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940B (17 February 2010); doi: 10.1117/12.843084
Show Author Affiliations
Yunfei Ma, Microvision, Inc. (United States)
Wyatt O. Davis, Microvision, Inc. (United States)
Matt Ellis, Microvision, Inc. (United States)
Dean Brown, Microvision, Inc. (United States)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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