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Proceedings Paper

Thermally tunable SOI CMOS photonics circuits
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Paper Abstract

Ring waveguide resonating structures with high quality factors are the key components in the silicon photonics portfolio boosting up its functionality and circuit performance. Due to a number of manufacturing reasons their peak wavelengths are often prone to deviate from designed values. In order to keep the ring resonator operating as specified, its peak wavelength then needs to be corrected in a reliable and power efficient way. We demonstrate the performance of the thermally tunable mux/demux filter ring structures fabricated in the commercial 130 nm SOI CMOS line.

Paper Details

Date Published: 16 February 2010
PDF: 6 pages
Proc. SPIE 7607, Optoelectronic Interconnects and Component Integration IX, 76070C (16 February 2010); doi: 10.1117/12.842903
Show Author Affiliations
Ivan Shubin, Sun Microsystems, Inc. (United States)
Xuezhe Zheng, Sun Microsystems, Inc. (United States)
Hiren Thacker, Sun Microsystems, Inc. (United States)
Jin Yao, Sun Microsystems, Inc. (United States)
Joannes Costa, Sun Microsystems, Inc. (United States)
Ying Luo, Sun Microsystems, Inc. (United States)
Guoliang Li, Sun Microsystems, Inc. (United States)
Ashok V. Krishnamoorthy, Sun Microsystems, Inc. (United States)
John E. Cunningham, Sun Microsystems, Inc. (United States)
Thierry Pinguet, Luxtera, Inc. (United States)
Attila Mekis, Luxtera, Inc. (United States)


Published in SPIE Proceedings Vol. 7607:
Optoelectronic Interconnects and Component Integration IX
Alexei L. Glebov; Ray T. Chen, Editor(s)

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