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Proceedings Paper

Prototyping of MWIR MEMS-based optical filter combined with HgCdTe detector
Author(s): Dmitry A. Kozak; Bautista Fernandez; Silviu Velicu; Joel Kubby
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Paper Abstract

In the past decades, there have been several attempts to create a tunable optical detector with operation in the infrared. The drive for creating such a filter is its wide range of applications, from passive night vision to biological and chemical sensors. Such a device would combine a tunable optical filter with a wide-range detector. In this work, we propose using a Fabry-Perot interferometer centered in the mid-wave infrared (MWIR) spectrum with an HgCdTe detector. Using a MEMS-based interferometer with an integrated Bragg stack will allow in-plane operation over a wide range. Because such devices have a tendency to warp, creating less-than-perfect optical surfaces, the Fabry-Perot interferometer is prototyped using the SOI-MUMPS process to ensure desirable operation. The mechanical design is aimed at optimal optical flatness of the moving membranes and a low operating voltage. The prototype is tested for these requirements. An HgCdTe detector provides greater performance than a pyroelectic detector used in some previous work, allowing for lower noise, greater detection speed and higher sensitivity. Both a custom HgCdTe detector and commercially available pyroelectric detector are tested with commercial optical filter. In previous work, monolithic integration of HgCdTe detectors with optical filters proved to be problematic. Part of this work investigates the best approach to combining these two components, either monolithically in HgCdTe or using a hybrid packaging approach where a silicon MEMS Fabry-Perot filter is bonded at low temperature to a HgCdTe detector.

Paper Details

Date Published: 17 February 2010
PDF: 11 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940W (17 February 2010); doi: 10.1117/12.842700
Show Author Affiliations
Dmitry A. Kozak, Univ. of California, Santa Cruz (United States)
Bautista Fernandez, Univ. of California, Santa Cruz (United States)
Silviu Velicu, EPIR Technologies (United States)
Joel Kubby, Univ. of California, Santa Cruz (United States)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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