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Proceedings Paper

Low-cost system for testing MEMS for research and educational applications
Author(s): Gabriel Ramirez; Ganapathy Sivakumar; Shelby Lacouture; Tim Dallas
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Paper Abstract

General access to MEMS is hampered by the expense of probe stations. We report on the construction of a lowcost system for operating MEMS devices for research and education. The system includes a driver-board, packaged MEMS chip (48 pin DIP - optical), and LabView VI. Typically, 20-40 separate devices (electrothermal and electrostatic actuators, micromirrors, and micro-positioners) are fabricated within the standard SUMMiT chip footprint (6.3x2.8mm). Educators can use the system to carry out labs for a variety of education levels. Researchers can use the system for prototyping new devices, developing better models for computer simulations, and utilizing devices for new applications.

Paper Details

Date Published: 5 February 2010
PDF: 4 pages
Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920M (5 February 2010); doi: 10.1117/12.842560
Show Author Affiliations
Gabriel Ramirez, Texas Tech Univ. (United States)
Ganapathy Sivakumar, Texas Tech Univ. (United States)
Shelby Lacouture, Texas Tech Univ. (United States)
Tim Dallas, Texas Tech Univ. (United States)

Published in SPIE Proceedings Vol. 7592:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
Richard C. Kullberg; Rajeshuni Ramesham, Editor(s)

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