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Proceedings Paper

Open loop control on large stroke MEMS deformable mirrors
Author(s): Alioune Diouf; Thomas G. Bifano; Andrew P. Legendre; Yang Lu; Jason B. Stewart
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Paper Abstract

Improvements for open-loop control of MEMS deformable mirror for large-amplitude wavefront control are presented. The improvements presented here relate to measurement filtering, characterization methods, and controlling the true, non-differential shape of the mirror. These improvements have led to increased accuracy over a wider variety of deflection profiles including flattening the mirror and Zernike polynomials.

Paper Details

Date Published: 18 February 2010
PDF: 7 pages
Proc. SPIE 7595, MEMS Adaptive Optics IV, 75950D (18 February 2010); doi: 10.1117/12.842489
Show Author Affiliations
Alioune Diouf, Boston Univ. Photonics Ctr. (United States)
Thomas G. Bifano, Boston Univ. Photonics Ctr. (United States)
Andrew P. Legendre, Boston Univ. Photonics Ctr. (United States)
Yang Lu, Boston Univ. Photonics Ctr. (United States)
Jason B. Stewart, Boston Micromachines Corp. (United States)


Published in SPIE Proceedings Vol. 7595:
MEMS Adaptive Optics IV
Scot S. Olivier; Thomas G. Bifano; Joel A. Kubby, Editor(s)

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