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Proceedings Paper

Low-frequency and high-efficiency energy harvesting with micromachined AlN suspended structures
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Paper Details

Date Published:
Proc. SPIE 7602, Gallium Nitride Materials and Devices V, 76021C; doi: 10.1117/12.842422
Show Author Affiliations
Adriana Passaseo, National Nanotechnology Lab. (Italy)
Alessandro Massaro, National Nanotechnology Lab. (Italy)
Stefano De Guido, National Nanotechnology Lab. (Italy)
Massimo De Vittorio, National Nanotechnology Lab. (Italy)

Published in SPIE Proceedings Vol. 7602:
Gallium Nitride Materials and Devices V
Jen-Inn Chyi; Yasushi Nanishi; Hadis Morkoç; Cole W. Litton; Joachim Piprek; Euijoon Yoon, Editor(s)

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