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Proceedings Paper

Mode properties of ALD filled slot waveguides
Author(s): A. Säynätjoki; T. Alasaarela; A. Khanna; A. Tervonen; S. Honkanen
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Paper Abstract

We study filling slot waveguide structures with atomic layer deposition. We present our recent progress on the growth of slot waveguide structures with oxide materials and their nanocomposites. The effects of the slot geometry and the optical parameters of the filling material on the mode properties are theoretically studied.

Paper Details

Date Published: 17 February 2010
PDF: 11 pages
Proc. SPIE 7606, Silicon Photonics V, 76061G (17 February 2010); doi: 10.1117/12.842262
Show Author Affiliations
A. Säynätjoki, Aalto Univ. (Finland)
T. Alasaarela, Aalto Univ. (Finland)
A. Khanna, Aalto Univ. (Finland)
A. Tervonen, Aalto Univ. (Finland)
S. Honkanen, Aalto Univ. (Finland)


Published in SPIE Proceedings Vol. 7606:
Silicon Photonics V
Joel A. Kubby; Graham T. Reed, Editor(s)

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