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Proceedings Paper

Polarization converted laser beams for micromachining applications
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Paper Abstract

Radial and azimuthal polarizations have attracted new interest in the process development community due to improved beam propagation and absorption conditions in the ablation cavity. This paper presents our recent activities and results on polarization converted ultrashort laser pulses by use of segmented half-wave-plates for the generation of ripple structures with predetermined sub-patterns. The formation of ripples fabricated in metals, ceramics, and semiconductors is analyzed by the morphological investigation of the structures (spacing and orientation) as a function of the polarization state of the laser beam.

Paper Details

Date Published: 16 February 2010
PDF: 8 pages
Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 759006 (16 February 2010); doi: 10.1117/12.842141
Show Author Affiliations
Ulrich Klug, Laser Zentrum Hannover e.V. (Germany)
Jan F. Düsing, Laser Zentrum Hannover e.V. (Germany)
Takashi Sato, Photonic Lattice, Inc. (Japan)
Kunihiko Washio, Paradigm Laser Research Ltd. (Japan)
Rainer Kling, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 7590:
Micromachining and Microfabrication Process Technology XV
Mary Ann Maher; Jung-Chih Chiao; Paul J. Resnick, Editor(s)

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