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Proceedings Paper

Deformable silicon membrane for dynamic linear laser beam diffuser
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Paper Abstract

We present a dynamic laser beam shaper based on MEMS technology. We show a prototype of a dynamic diffuser made of single crystal silicon. A linearly deformable silicon micromembrane is used to diffuse a laser beam in one dimension. Resonance frequencies of the membrane can range from 1 kHz to 20 kHz. Mode shapes of the deformable mirror are excited using magnetic actuation. Diffusing angle can be tuned by adjusting the driving current in the membrane. We measured a diffusing angle of 1° for an applied current of 40 mA. The aluminum coated mirror can handle 140 W/cm2 of visible to infrared optical power. Application to smooth out interference pattern generated by a static diffuser is shown.

Paper Details

Date Published: 16 February 2010
PDF: 8 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940F (16 February 2010); doi: 10.1117/12.842015
Show Author Affiliations
J. Masson, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
A. Bich, SUSS MicroOptics SA (Switzerland)
H. P. Herzig, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
R. Bitterli, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
W. Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
T. Scharf, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
R. Voelkel, SUSS MicroOptics SA (Switzerland)
K. J. Weible, SUSS MicroOptics SA (Switzerland)
N. F. de Rooij, Ecole Polytechnique Fédérale de Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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