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Proceedings Paper

Micro-patternable hybrid nanocomposites with tailorable mechanical and thermomechanical properties
Author(s): Carsten Becker-Willinger; Pamela Kalmes; Petra Herbeck-Engel; Michael Veith
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Paper Abstract

A new type of cationically polymerizable organic-inorganic hybrid nanocomposite with micro-patternability and tailor able thermomechanical properties has been developed[1]. The material has been built by co-condensation of 3-glycidyloxypropyl-triethoxysilane and phenyltriethoxysilane followed by subsequent mixing with oligomeric cycloaliphatic epoxy resin as organic co-monomer. Nanocomposite mixtures have been formed by dispersing silica nanoparticles with 15 nm particle size into the performed matrix sol. To achieve an almost homogeneous distribution of the nanoparticles over the matrix different surface modifiers have been applied on the silica surface. The resulting transparent mixtures have been applied on silicon substrates and have been UV-polymerized using a cationic photoinitiator. The mechanical and thermomechanical properties as well as the resolution of photo patterns have been followed in dependence of the nanoparticulate filler content and the type of surface modification. Photo patterns could be created with high edge steepness even for highly filled systems. The universal hardness increased from 145 MPa for the unfilled hybrid resin to 244 MPa for the system containing 30 wt.-% silica. The same nanocomposite system showed an elastic modulus of about 5090 MPa compared to the unfilled hybrid resin of 3380 MPa which indicates the high potential of these materials forming mechanically stable patterns.

Paper Details

Date Published: 16 February 2010
PDF: 13 pages
Proc. SPIE 7591, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III, 75910G (16 February 2010); doi: 10.1117/12.841668
Show Author Affiliations
Carsten Becker-Willinger, Leibniz Institute for New Materials (Germany)
Pamela Kalmes, Leibniz Institute for New Materials (Germany)
Petra Herbeck-Engel, Leibniz Institute for New Materials (Germany)
Michael Veith, Leibniz Institute for New Materials (Germany)


Published in SPIE Proceedings Vol. 7591:
Advanced Fabrication Technologies for Micro/Nano Optics and Photonics III
Winston V. Schoenfeld; Jian Jim Wang; Marko Loncar; Thomas J. Suleski, Editor(s)

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