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Proceedings Paper

Optimal design of SAW-based gyroscope to improve sensitivity
Author(s): Haekwan Oh; Sangsik Yang; Keekeun Lee
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Paper Abstract

A surface acoustic wave (SAW)-based gyroscope was developed on a piezoelectric substrate. The developed gyroscope consists of two SAW oscillators, metallic dots, and absorber. Coupling of mode (COM) modeling was conducted to determine the optimal device parameters prior to fabrication. Depending on the angular velocity, the difference of the oscillation frequency was modulated. The obtained sensitivity was approximately 52.35 Hz/deg·s at an angular rate range of 0~1000 deg/s.

Paper Details

Date Published: 4 February 2010
PDF: 10 pages
Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920O (4 February 2010); doi: 10.1117/12.841531
Show Author Affiliations
Haekwan Oh, Ajou Univ. (Korea, Republic of)
Sangsik Yang, Ajou Univ. (Korea, Republic of)
Keekeun Lee, Ajou Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7592:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
Richard C. Kullberg; Rajeshuni Ramesham, Editor(s)

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