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Proceedings Paper

Semiconductor nanomembranes for stacked and flexible photonics
Author(s): Weidong Zhou; Zhenqiang Ma; Hongjun Yang; Li Chen; Weiquan Yang; Zexuan Qiang; Guoxuan Qin; Huiqing Pang; Santhad Chuwongin; Deyin Zhao
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Paper Abstract

Crystalline semiconductor nanomembranes (NMs), which are transferable, stackable, bondable and manufacturable, offer unprecedented opportunities for unique and novel device applications. We report here nanophotonic devices based on stacked semiconductor NMs on Si, glass and flexible PET substrates. Photonic crystal Fano resonance-based surface-normal optical filters and broadband reflectors have been demonstrated with unique angle and polarization properties. Flexible photodetectors and solar cells have also been developed based on the NM stacking processes. Such NM stacking process can lead to a paradigm shift on silicon photonic integration and inorganic flexible photonics.

Paper Details

Date Published: 17 February 2010
PDF: 10 pages
Proc. SPIE 7606, Silicon Photonics V, 76060U (17 February 2010); doi: 10.1117/12.841426
Show Author Affiliations
Weidong Zhou, The Univ. of Texas at Arlington (United States)
Zhenqiang Ma, Univ. of Wisconsin-Madison (United States)
Hongjun Yang, The Univ. of Texas at Arlington (United States)
Li Chen, The Univ. of Texas at Arlington (United States)
Weiquan Yang, The Univ. of Texas at Arlington (United States)
Zexuan Qiang, The Univ. of Texas at Arlington (United States)
Guoxuan Qin, Univ. of Wisconsin-Madison (United States)
Huiqing Pang, Univ. of Wisconsin-Madison (United States)
Santhad Chuwongin, The Univ. of Texas at Arlington (United States)
Deyin Zhao, The Univ. of Texas at Arlington (United States)


Published in SPIE Proceedings Vol. 7606:
Silicon Photonics V
Joel A. Kubby; Graham T. Reed, Editor(s)

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