Share Email Print

Proceedings Paper

Original GaN-based LED structure on ZnO template by MOCVD
Author(s): Ray-Ming Lin; Sheng-Fu Yu; Miin-Jang Chen; Wen-Ching Hsu
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

In this study, we have successfully grown blue LED structure on ZnO template (deposited on sapphire substrate by atomic layer deposition, ALD) by atmospheric pressure metal-organic chemical vapor deposition (AP-MOCVD). Although GaN semiconductor material is very similar to ZnO in many ways, i.e. relatively small lattice mismatch ~1.8 % compared with traditional sapphire substrate~16 %, it still has a big challenge when GaN-based LEDs grow on ZnO template at usually growth temperature near 1100°C. With too high a temperature and a long deposited time, it would cause reaction at GaN/ZnO interface which is a vital reason that degrades the GaN crystalline quality. In view of this, we introduced an optimized thin AlN cover layer on ZnO template protecting the underneath ZnO layer and then obtained a real work LED structure. Meanwhile, the TEM measurement characterized the epilayer crystalline structure. The optical properties also were carried out by photoluminescence and electroluminescence analysis. Finally, with a suitable fabrication of LED processing, the ZnO template may has the potential as a sacrificial layer by chemical etching technical instead of conventional laser lifted-off.

Paper Details

Date Published: 12 March 2010
PDF: 7 pages
Proc. SPIE 7602, Gallium Nitride Materials and Devices V, 76021L (12 March 2010); doi: 10.1117/12.841336
Show Author Affiliations
Ray-Ming Lin, National Cheng Kung Univ. (Taiwan)
Sheng-Fu Yu, Chang Gung Univ. (Taiwan)
Miin-Jang Chen, National Taiwan Univ. (Taiwan)
Wen-Ching Hsu, Sino-American Silicon Products Inc. (Taiwan)

Published in SPIE Proceedings Vol. 7602:
Gallium Nitride Materials and Devices V
Jen-Inn Chyi; Yasushi Nanishi; Hadis Morkoç; Cole W. Litton; Joachim Piprek; Euijoon Yoon, Editor(s)

© SPIE. Terms of Use
Back to Top