Share Email Print
cover

Proceedings Paper

Study on performance of p-Si thin film fabricated by aluminum induced lateral crystallization at low temperature
Author(s): Qiankun Chen; Xiangbin Zeng; Yu Zeng; Luo Liu; Yanyan Yang
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

Nowadays, low temperature polycrystalline silicon thin film transistor (poly-Si TFT) has been the most popular subject in active matrix liquid display (AMLCD) and active matrix organic light emitting display (AMOLED). Relative to the other crystallization technique, aluminum-induced crystallization have certain advantages in lower temperature, and of course, lower cost than any other methods. This paper gives a research on the performance of poly-Si thin film fabricated by aluminum-induced electric field enhancing lateral crystallization at low temperature (<600°C). Raman spectra, X-ray diffraction and scan electron microscope were used to analyze the crystallization state, crystal structure and surface morphology of the poly-Si thin film. Results show that the poly-Si thin film has good crystallinity, and the electric field has the effect of enhancing the crystallization when direct current electric voltage is added to the film during annealing. In addition to this, the metal aluminum induced crystallization was monitored in the whole progress when Al was diffusing into the a-Si thin film by measuring resistance of crystallizing thin film. The poly-Si thin film fabricated by this low temperature electric enhancing aluminum-induced crystallization technique was obtained. The results show that it is suitable for P-Si TFTs which is widely used in AMLCD and AMOLED.

Paper Details

Date Published: 12 October 2009
PDF: 7 pages
Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 751810 (12 October 2009); doi: 10.1117/12.841228
Show Author Affiliations
Qiankun Chen, Huazhong Univ. of Science and Technology (China)
Xiangbin Zeng, Huazhong Univ. of Science and Technology (China)
Yu Zeng, Huazhong Univ. of Science and Technology (China)
Luo Liu, Huazhong Univ. of Science and Technology (China)
Yanyan Yang, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7518:
Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies
Michael Grätzel; Hiroshi Amano; Chin Hsin Chen; Changqing Chen; Peng Wang, Editor(s)

© SPIE. Terms of Use
Back to Top