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Proceedings Paper

Experiment and simulation on responses of polymer induced by laser irradiation
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Paper Abstract

With the development of microelectromechanical system (MEMS) technology, the limitations of machining technology for silicon-based materials become more and more distinct. With its abilities on sub-micron structure machining, the pulsed laser micro-fabrication technology has an extensive application prospect in MEMS and many other materials. The thermal interaction process of polymer under laser irradiation is very complex, regularities on polymer target under laser irradiation between displacement and laser energy density can only be obtained through experiments. Based on finite element method (FEM), simulations have been performed and compared with experiment results. Relations among pulsed laser intensity, actuation duration and thermal shock loads were obtained from the comparison, and a formula for calculating the maximum ablation pressure of a carbon fiber epoxy resin polymer composites was proposed. This study provides theoretical basis to the pulsed laser micro-fabrication technology's application in the fields of MEMS.

Paper Details

Date Published: 20 October 2009
PDF: 7 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 749325 (20 October 2009); doi: 10.1117/12.841221
Show Author Affiliations
Haiming Huang, Beijing Jiaotong Univ. (China)
Xiaoliang Xu, Beijing Jiaotong Univ. (China)

Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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