Share Email Print
cover

Proceedings Paper

Design and fabrication of a micro-mirror for spectroscopy
Author(s): K. Ajay Giri Prakash; Sanjay Dhabai; Enakshi Bhattacharya; Shanti Bhattacharya
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

A wide variety of MEMS micro-mirrors are being developed for various optical applications. One such application is Fourier Transform Spectrometry (FTS). The design, process optimization and fabrication of a micro-mirror for this application is presented. Large, non-tilting displacements of mirrors are required to achieve high FTS resolution. In order to obtain this without using Deep Reactive Ion Etching (DRIE), the micro-mirrors were fabricated on silicon using bulk micromachining techniques. This paper will present the process developed for fabrication of the mirror with the required specifications. In addition, results of the FTS experiments conducted with the micro-mirror will also be presented.

Paper Details

Date Published: 17 February 2010
PDF: 6 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940X (17 February 2010); doi: 10.1117/12.840994
Show Author Affiliations
K. Ajay Giri Prakash, Indian Institute of Technology Madras (India)
Sanjay Dhabai, Indian Institute of Technology Madras (India)
Enakshi Bhattacharya, Indian Institute of Technology Madras (India)
Shanti Bhattacharya, Indian Institute of Technology Madras (India)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

© SPIE. Terms of Use
Back to Top