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Proceedings Paper

Holographic femtosecond laser processing
Author(s): Yoshio Hayasaki
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Paper Abstract

Parallel femtosecond laser processing using a computer-generated hologram (CGH) displayed on a spatial light modulator, called holographic femtosecond laser processing, has advantages of high throughput and high light-use efficiency of the laser pulse energy. We demonstrate two types of the holographic femtosecond laser processing that are implemented with a Fourier transform CGH and a Fresnel transform CGH. We present some demonstrations of twodimensional and three-dimensional parallel laser processing.

Paper Details

Date Published: 18 February 2010
PDF: 11 pages
Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840E (18 February 2010); doi: 10.1117/12.840974
Show Author Affiliations
Yoshio Hayasaki, Utsunomiya Univ. (Japan)


Published in SPIE Proceedings Vol. 7584:
Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
Hiroyuki Niino; Michel Meunier; Bo Gu; Guido Hennig; Jan J. Dubowski, Editor(s)

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