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Proceedings Paper

'No blue' LED solution for photolithography room illumination
Author(s): Haiyan Ou; Dennis Corell; Carsten Dam-Hansen; Paul-Michael Petersen; Dan Friis
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Paper Abstract

This paper explored the feasibility of using a LED-based bulb as the illumination light source for photolithography room. A no-blue LED was designed, and the prototype was fabricated. The spectral power distribution of both the LED bulb and the yellow fluorescent tube was measured. Based on that, colorimetric values were calculated and compared on terms of chromatic coordinates, correlated color temperature, color rendering index, and chromatic deviation. Gretagmacbeth color charts were used as a more visional way to compare the two light sources, which shows that our no-blue LED bulb has much better color rendering ability than the YFT. Furthermore, LED solution has design flexibility to improve it further. The prototype has been tested with photoresist SU8-2005. Even after 15 days of illumination, no effect was observed. So this LED-based solution was demonstrated to be a very promising light source for photolithography room illumination due to its better color rendering in addition to energy efficiency, long life time and design flexibility.

Paper Details

Date Published: 12 February 2010
PDF: 7 pages
Proc. SPIE 7617, Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIV, 76170Z (12 February 2010); doi: 10.1117/12.840903
Show Author Affiliations
Haiyan Ou, Technical Univ. of Denmark (Denmark)
Dennis Corell, Technical Univ. of Denmark (Denmark)
Carsten Dam-Hansen, Technical Univ. of Denmark (Denmark)
Paul-Michael Petersen, Technical Univ. of Denmark (Denmark)
Dan Friis, RGB Lamps (Denmark)


Published in SPIE Proceedings Vol. 7617:
Light-Emitting Diodes: Materials, Devices, and Applications for Solid State Lighting XIV
Klaus P. Streubel; Heonsu Jeon; Li-Wei Tu; Norbert Linder, Editor(s)

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