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Proceedings Paper

High-index-contrast subwavelength grating VCSEL
Author(s): Philippe Gilet; Nicolas Olivier; Philippe Grosse; Karen Gilbert; Alexei Chelnokov; Il-Sug Chung; Jesper Mørk
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Paper Abstract

In this article, we report our results on 980nm high-index-contrast subwavelength grating (HCG) VCSELs for optical interconnection applications. In our structure, a thin undoped HCG layer replaces a thick p-type Bragg mirror. The HCG mirror can feasibly achieve polarization-selective reflectivities close to 100%. The investigated structure consists of a HCG mirror with an underneath λ/4-thick oxide gap, four p-type GaAlAs/GaAs pairs for current spreading, three InGaAs/GaAs quantum wells, and an n-type GaAlAs/GaAs Bragg mirror. The HCG structure was defined by e-beam lithography and dry etching. The current oxide aperture and the oxide gap underneath the HCG were simultaneously formed by the selective wet oxidation process. Compared to air-gap high contrast grating mirrors demonstrated elsewhere, our grating mirrors are particular since they are supported by thinner λ/4 aluminium oxide layer, and thus are mechanically robust and thinner than usual designs. Sub-milliamp threshold currents and single-transverse-mode operation was obtained. A hero device exhibited maximum singlemode output power of more than 4 mW at room temperature and 1 mw at 70°C, which are the highest values ever reported from the HCG structures. These results build a bridge between a standard VCSEL and a hybrid laser on silicon, making them of potential use for the realization of silicon photonics.

Paper Details

Date Published: 5 February 2010
PDF: 8 pages
Proc. SPIE 7615, Vertical-Cavity Surface-Emitting Lasers XIV, 76150J (5 February 2010); doi: 10.1117/12.840884
Show Author Affiliations
Philippe Gilet, CEA, LETI, Minatec (France)
Nicolas Olivier, CEA, LETI, Minatec (France)
Philippe Grosse, CEA, LETI, Minatec (France)
Karen Gilbert, CEA, LETI, Minatec (France)
Alexei Chelnokov, CEA, LETI, Minatec (France)
Il-Sug Chung, Technical Univ. of Denmark (Denmark)
Jesper Mørk, Technical Univ. of Denmark (Denmark)

Published in SPIE Proceedings Vol. 7615:
Vertical-Cavity Surface-Emitting Lasers XIV
James K. Guenter; Kent D. Choquette, Editor(s)

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