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Proceedings Paper

High-speed liquid lens with 2-ms response and 80.3-nm root-mean-square wavefront error
Author(s): Hiromasa Oku; Masatoshi Ishikawa
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Paper Abstract

A liquid lens structure with a step response time of 2 ms, a refractive power range of 52 D, and a root-meansquare (RMS) wavefront error of 80.3 nm is reported. This lens uses a liquid-liquid interface with a pinned contact line as a variable refractive surface, and its shape is controlled by a piezo stack actuator via a built-in hydraulic amplifier. The potential applications of this device include axial focus scanning of microscopes and focusing/zooming of camera lenses and machine vision systems.

Paper Details

Date Published: 16 February 2010
PDF: 11 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759407 (16 February 2010); doi: 10.1117/12.840855
Show Author Affiliations
Hiromasa Oku, The Univ. of Tokyo (Japan)
Masatoshi Ishikawa, The Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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