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Proceedings Paper

High aspect ratio micromirror array with two degrees of freedom for femtosecond pulse shaping
Author(s): Stefan M. Weber; Wilfried Noell; Sébastien Lani; Fabio Jutzi; Peter Brühlmeier; Denis Kiselev; Jérôme Extermann; Luigi Bonacina; Jean-Pierre Wolf; Nico F. de Rooij
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Paper Abstract

We show the first results of a linear 100-micromirror array capable of modulating the phase and amplitude of the spectral components of femtosecond lasers. Using MEMS-based reflective systems has the advantage of utilizing coatings tailored to the laser wavelength range. The innovative features of our device include a novel rotational, vertical comb-drive actuator and an X-shaped, laterally reinforced spring that prevents lateral snap-in while providing flexibility in the two degrees of freedom of each mirror, namely piston and tilt. The packaging utilizes high-density fine-pitch wire-bonding for on-chip and chip-to-PCB connectivity. For the first deployment, UV-shaped pulses will be produced to coherently control the dynamics of biomolecules.

Paper Details

Date Published: 16 February 2010
PDF: 8 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940J (16 February 2010); doi: 10.1117/12.840847
Show Author Affiliations
Stefan M. Weber, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Univ. de Genève (Switzerland)
Wilfried Noell, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Sébastien Lani, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Fabio Jutzi, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Peter Brühlmeier, Ecole Polytechnique Fédérale de Lausanne (Switzerland)
Denis Kiselev, Univ. de Genève (Switzerland)
Jérôme Extermann, Univ. de Genève (Switzerland)
Luigi Bonacina, Univ. de Genève (Switzerland)
Jean-Pierre Wolf, Univ. de Genève (Switzerland)
Nico F. de Rooij, Ecole Polytechnique Fédérale de Lausanne (Switzerland)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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