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Proceedings Paper

Laser texturing of doped borosilicate glasses
Author(s): Alexander Streltsov; James Dickinson; Richard Grzybowski; Daniel Harvey; Stephan Logunov; Alper Ozturk; James Sutherland; Marcel Potuzak
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Paper Abstract

We describe a novel process of laser-assisted fabrication of surface structures on doped oxide glasses with heights reaching 10 - 13% of the glass thickness. This effect manifests itself as a swelling of the irradiated portion of the glass, and occurs in a wide range of glass compositions. The extent of such swelling depends on the glass base composition. Doping with Fe, Ti, Co, Ce, and other transition metals allows for adjusting the absorption of the glass and maximizing the feature size. In the case of bumps grown on borosilicate glasses, we observe reversible glass swelling and the bump height can increase or decrease depending on whether the consecutive laser pulse has higher or lower energy compared with the previous one. To understand the hypothetical mechanism, which includes laser heating of glass, glass melting, and directional flow, we explored density, refractive index, fictive temperature, and phase separation dynamics.

Paper Details

Date Published: 17 February 2010
PDF: 12 pages
Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 75840S (17 February 2010); doi: 10.1117/12.840689
Show Author Affiliations
Alexander Streltsov, Corning Inc. (United States)
James Dickinson, Corning Inc. (United States)
Richard Grzybowski, Corning Inc. (United States)
Daniel Harvey, Corning Inc. (United States)
Stephan Logunov, Corning Inc. (United States)
Alper Ozturk, Corning Inc. (United States)
James Sutherland, Corning Inc. (United States)
Marcel Potuzak, Corning Inc. (United States)

Published in SPIE Proceedings Vol. 7584:
Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
Hiroyuki Niino; Michel Meunier; Bo Gu; Guido Hennig; Jan J. Dubowski, Editor(s)

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