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Proceedings Paper

Study on the optical property of the micro Fabry-Perot cavity tunable filter
Author(s): Qinghua Meng; Sihai Chen; Luqing Wu; Shan Dong; Shiwei Bao
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Paper Abstract

Pushbroom Hyperspectral Imager (PHI) is a new intensively researched subject in the spectral imaging field. Hyperspectral imaging is getting wide attention due to their high spectral resolution. The conventional imaging spectrometer uses prism and grating as dispersive component. As the Fabry-Perot (F-P) cavity has high resolution and excellent frequency selectivity, in this paper, MEMS F-P array filter is used as the light splitting device. It is compact, fast modulate rate, high precise and easy to be integrated. In this paper, the optical property of the integrated micro F-P cavity tunable filter has been studied. Optical thin film design software TFCalc has been adopted to design the optical thin film of the micro filter. Design and analysis of antireflection coatings, high reflection and the F-P cavity interference filter. The test results show that the optical properties of the fabricated samples are consistent with the design results. In order to simulate the working mechanism of the micro F-P cavity, two filters were fixed together to form an F-P cavity. The filter effect of the F-P cavity was tested using a spectrometer, the comb filter pattern was observed. The feasibility of the optical F-P cavity tunable filter is confirmed.

Paper Details

Date Published: 26 October 2009
PDF: 7 pages
Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160T (26 October 2009); doi: 10.1117/12.840675
Show Author Affiliations
Qinghua Meng, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)
Guangxi Teachers Education Univ. (China)
Sihai Chen, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)
Luqing Wu, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)
Shan Dong, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)
Shiwei Bao, Huazhong Univ. of Science and Technology (China)
Wuhan National Lab. for Optoelectronics (China)


Published in SPIE Proceedings Vol. 7516:
Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration
Zishen Zhao; Ray T. Chen; Yong Chen; Jinzhong Yu; Junqiang Sun; Weiwei Dong, Editor(s)

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