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Proceedings Paper

High-density integrated optics in ion-sliced lithium niobate thin films
Author(s): Gorazd Poberaj; Manuel Koechlin; Frederik Sulser; Peter Günter
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Paper Abstract

We report on the fabrication of ion-sliced single-crystalline lithium niobate thin films and realization of electro-optically tunable microring resonators and photonic bandgap structures for high-density integrated optics devices. Using a home-built high-resolution laser lithography system we structured microring resonators with a free spectral range of > 7 nm, a quality factor of up to 10'000, and a tunability of 1 pm/V at wavelengths around 1.55 μm. Moreover, we show that the fabricated microrings can be detached from the original substrate and transferred onto any host substrate. This opens new possibilities for building hybrid integrated optics devices based on lithium niobate microrings and laterally or vertically coupled waveguides of different materials. Combining the laser lithography patterning and focused ion beam milling we have also fabricated planar photonic crystals structures. Triangular lattices of holes with a diameter of 240 nm and a separation of 500 nm exhibit a photonic bandgap in the wavelength range from 1390 and 1500 nm with an extinction ratio of up to 15 dB.

Paper Details

Date Published: 11 February 2010
PDF: 9 pages
Proc. SPIE 7604, Integrated Optics: Devices, Materials, and Technologies XIV, 76040U (11 February 2010); doi: 10.1117/12.840660
Show Author Affiliations
Gorazd Poberaj, ETH Zürich (Switzerland)
Manuel Koechlin, ETH Zürich (Switzerland)
Frederik Sulser, ETH Zürich (Switzerland)
Peter Günter, ETH Zürich (Switzerland)

Published in SPIE Proceedings Vol. 7604:
Integrated Optics: Devices, Materials, and Technologies XIV
Jean-Emmanuel Broquin; Christoph M. Greiner, Editor(s)

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