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Proceedings Paper

Characteristic of TiNi(Cu) shape memory thin film based on micropump
Author(s): Huijun Zhang; Chengjun Qiu
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Paper Abstract

Shape memory thin films offer a unique combination of novel properties and have the potential to become a primary actuating mechanism for micropumps. In this study, a micropump driven by TiNiCu shape memory thin film is designed and fabricated. The micropump is composed of a TiNiCu/Si bimorph driving membrane, a pump chamber and two inlet and outlet check valves. The property of TiNiCu films and driving capacity of TiNiCu/Si bimorph driving membrane are investigated. By using the recoverable force of TiNiCu thin film and biasing force of silicon membrane, the actuation diaphragm realizes reciprocating motion effectively. Experimental results show that the film surface appears a smooth and featureless morphology without any cracks, and the hysteresis width ΔT of TiNiCu film is about 2-3°C, the micropump driving by TiNiCu film has good performance, such as high pumping yield, high working frequency, stable driving capacity, and long fatigue life time.

Paper Details

Date Published: 20 October 2009
PDF: 6 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74936X (20 October 2009); doi: 10.1117/12.840655
Show Author Affiliations
Huijun Zhang, Heilongjiang Univ. (China)
Chengjun Qiu, Heilongjiang Univ. (China)


Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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