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Proceedings Paper

Optical position feedback and phase control of MOEMS scanner mirrors
Author(s): A. Tortschanoff; M. Lenzhofer; A. Frank; M. Wildenhain; T. Sandner; H. Schenk; A. Kenda
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Paper Abstract

Resonantly driven oscillating MOEMS mirrors are used in various fields in optics, telecommunications and spectroscopy. One of the important challenges in this context is to assure stable resonant oscillation with well controlled amplitude under varying environmental conditions. For this reason, we developed a compact device comprising a resonant MOEMS micro-mirror, optical position sensing, and driver electronics, with closed loop control, which ensures operation close to the mirror resonance. In this contribution we present this device and show experimental results with a 23 kHz MOEMS mirror, which demonstrate its capabilities and limitations.

Paper Details

Date Published: 16 February 2010
PDF: 11 pages
Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 75940K (16 February 2010); doi: 10.1117/12.840629
Show Author Affiliations
A. Tortschanoff, Carinthian Tech Research AG (Austria)
M. Lenzhofer, Carinthian Tech Research AG (Austria)
A. Frank, Carinthian Tech Research AG (Austria)
M. Wildenhain, Fraunhofer Institute for Photonic Microsystems (Germany)
T. Sandner, Fraunhofer Institute for Photonic Microsystems (Germany)
H. Schenk, Fraunhofer Institute for Photonic Microsystems (Germany)
A. Kenda, Carinthian Tech Research AG (Austria)


Published in SPIE Proceedings Vol. 7594:
MOEMS and Miniaturized Systems IX
Harald Schenk; Wibool Piyawattanametha, Editor(s)

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