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Proceedings Paper

Preparation of BST ferroelectric thin films by pulsed laser deposition for infrared sensor
Author(s): Long Zeng; Gang Sheng; Zhenlun Zhang; Pingxiong Yang
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Paper Abstract

Barium strontium titanate (Ba1-xSrxTiO3) shows great potential in optical device applications, especially in infrared uncooled focal plane arrays (UFPAs) fabrication. In this paper, Ba0.5Sr0.5TiO3 ferroelectric thin films were successfully deposited on different substrates by pulsed laser deposition (PLD) with an aim to fabricate dielectric bolometer type infrared (IR) sensor. The microstructure, crystalline characterization and surface morphology of the film were studied by XRD pattern and Atomic Force Microscope (AFM). The fabricated thin films show a similar perovskite structure, have evenly distributed grains and dense, crack-free surface. The dielectric properties and ferroelectric properties of the films are also studied after deposition of the top Pt electrodes. Results show that the film has fine dielectric and ferroelectric properties and could be used for infrared sensor fabrication. Buffer layer effect on film properties is also discussed. The use of different buffer layers could strongly influence the film performance. As in optical device applications, the buffer layer effect should be considered in film fabrication.

Paper Details

Date Published: 13 October 2009
PDF: 6 pages
Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 75180U (13 October 2009); doi: 10.1117/12.840396
Show Author Affiliations
Long Zeng, East China Normal Univ. (China)
Gang Sheng, East China Normal Univ. (China)
Zhenlun Zhang, East China Normal Univ. (China)
Pingxiong Yang, East China Normal Univ. (China)


Published in SPIE Proceedings Vol. 7518:
Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies

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