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Proceedings Paper

Bio-molecules detection sensor using silicon nanowire
Author(s): Pan K. Kim; Seong J. Cho; Jungwoo Sung; Hyun S. Oh; Geunbae Lim
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Paper Abstract

To detect a signal change in nano scale, Schottky barrier - silicon nanowire field effect transistor (SB-SiNWFET) for detecting a bio-molecule was fabricated by combining E-beam lithography and conventional MEMS technique. Detection of few bio-molecules is enabled by realizing the gold nanodots on silicon nanowire (SiNW). By performing pH test and carbohydrate binding measurement, we conclude that our sensor can detect very small quantity of biomolecules.

Paper Details

Date Published: 20 October 2009
PDF: 7 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935D (20 October 2009); doi: 10.1117/12.840353
Show Author Affiliations
Pan K. Kim, Korea Electrotechnology Research Institute (Korea, Republic of)
Seong J. Cho, Postech (Korea, Republic of)
Jungwoo Sung, Postech (Korea, Republic of)
Hyun S. Oh, Korea Electrotechnology Research Institute (Korea, Republic of)
Geunbae Lim, Postech (Korea, Republic of)


Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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