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Proceedings Paper

Research on piezoelectricity materials films of MEMS surface acoustic wave gas sensor
Author(s): Chengjun Qiu; Dan Bu; Hongmei Liu; Yafei Feng
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Paper Abstract

The structure of SAW gas sensor based on the PZT film is provided, which includes mainly the PZT piezoelectric thick film, interdigital transducers and gas sensing films. The PZT piezoelectric thick film is fabricated on the structure of Au/Cr/SiO2/Si multilayer films. The fabrication technology of PZT film is also discussed which is compatible with the MEMS fabrication technology. The measurement results show that the remanent polarization and the coercive field of PZT thick films are up to 60μC/cm2 and 23kV/cm at 25V, respectively, and the results demonstrate that the siliconbased PZT thick films possess well property which suitable for SAW device for farther application.

Paper Details

Date Published: 20 October 2009
PDF: 6 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935C (20 October 2009); doi: 10.1117/12.840328
Show Author Affiliations
Chengjun Qiu, Heilongjiang Univ. (China)
Dan Bu, Heilongjiang Univ. (China)
Hongmei Liu, Heilongjiang Univ. (China)
Yafei Feng, Heilongjiang Univ. (China)

Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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