Share Email Print
cover

Proceedings Paper

Common-path Phase-shifting interference microscope and its applications
Author(s): Jun Chen; Kojiro Nagata
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Details

Date Published:
PDF
Proc. SPIE 7511, 2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems, 75112X; doi: 10.1117/12.840111
Show Author Affiliations
Jun Chen, Tokyo Polytechnic Univ. (Japan)
Kojiro Nagata, Tokyo Polytechnic Univ. (Japan)


Published in SPIE Proceedings Vol. 7511:
2009 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Systems

© SPIE. Terms of Use
Back to Top