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Proceedings Paper

Mach-Zehnder electro-optic modulator based on silicon nanophotonic waveguide
Author(s): Xuejun Xu; Haihua Xu; Zhongchao Fan; Yude Yu; Jinzhong Yu
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Paper Abstract

An electro-optic modulator based on Mach-Zehnder interferometer and embedded PIN diode is demonstrated using silicon nanophotonic waveguide. Measurement results show that the device has high modulation efficiency with a VπL figure of merit of 1.14 V·mm, high modulation depth of 96.27%, and large optical bandwidth from 1500 to 1600 nm. Transmission data rate up to 0.2 Gbps is demonstrated and the rise and fall time are 3.74 ns and 640 ps, respectively.

Paper Details

Date Published: 26 October 2009
PDF: 5 pages
Proc. SPIE 7516, Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration, 75160C (26 October 2009); doi: 10.1117/12.840007
Show Author Affiliations
Xuejun Xu, Institute of Semiconductors (China)
Haihua Xu, Institute of Semiconductors (China)
Zhongchao Fan, Engineering Research Ctr. for Semiconductor Integrated Technology (China)
Yude Yu, Institute of Semiconductors (China)
Jinzhong Yu, Institute of Semiconductors (China)


Published in SPIE Proceedings Vol. 7516:
Photonics and Optoelectronics Meetings (POEM) 2009: Optoelectronic Devices and Integration
Zishen Zhao; Ray T. Chen; Yong Chen; Jinzhong Yu; Junqiang Sun; Weiwei Dong, Editor(s)

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