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Proceedings Paper

A new digital silicon MEMS gyroscope
Author(s): L. F. Wu; Zh. Peng; Wei Zhang; F. X. Zhang
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Paper Abstract

This paper presents a new, digital silicon MEMS gyroscope, which consists of micro-sensor, signal processing circuit and micro-processor (MSC1214). The gyroscope structure allows it to achieve rolling rate, yaw angular rate and pitch angular rate of rotating carrier. That is, it can detect the attitude of a rotating carrier. The key techniques of MEMS gyroscope, including sensing construct, sensing principle, signal processing circuit design and test results are presented. The test results show that the non-linearity of the gyroscope is less than 0.5% and sensitivity of the gyroscope is 0.01°/s at atmospheric pressure, measuring range of yaw (or pitch) angular rate and rolling rate of rotating carrier is from -500 ° /s to +500 °/s and 0 Hz to 40 Hz, respectively.

Paper Details

Date Published: 20 October 2009
PDF: 7 pages
Proc. SPIE 7493, Second International Conference on Smart Materials and Nanotechnology in Engineering, 74935X (20 October 2009); doi: 10.1117/12.839936
Show Author Affiliations
L. F. Wu, Beijing University of Posts and Telecommunications (China)
Zh. Peng, North China Institute of Science and Technology (China)
Wei Zhang, Beijing Information Science and Technology Univ. (China)
F. X. Zhang, Beijing Information Science and Technology Univ. (China)


Published in SPIE Proceedings Vol. 7493:
Second International Conference on Smart Materials and Nanotechnology in Engineering
Jinsong Leng; Anand K. Asundi; Wolfgang Ecke, Editor(s)

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