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Proceedings Paper

Laser scattering based identification of micro-surface conditions for the inspection of solar cell wafer
Author(s): Yeon Ki Hong; Gyung Bum Kim; Young-Jun Jin
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Paper Abstract

In this paper, micro-surface roughness has been experimentally identified using laser scattering images. At first, previous surface evaluation methods, laser scattering parameters and optical deflected rays are investigated and then laser scattering inspection mechanism is developed. Its optimum parameters on grinding surfaces are selected using a design of experiment. It is shown that the mean of vertical scattering distributions is characterized as wavelet in laser scattering images with the selected optimal parameters. Also, the dominant feature of laser scattering distributions is linearly increased according to grinding surface roughness and so the information can be used as important factor for the measurement and evaluation of various surface roughnesses. The proposed laser scattering method is applied to the evaluation inspection of crystalline silicon wafer surfaces for solar cell.

Paper Details

Date Published: 18 February 2010
PDF: 7 pages
Proc. SPIE 7584, Laser Applications in Microelectronic and Optoelectronic Manufacturing XV, 758411 (18 February 2010); doi: 10.1117/12.839933
Show Author Affiliations
Yeon Ki Hong, Chungju National Univ. (Korea, Republic of)
Gyung Bum Kim, Chungju National Univ. (Korea, Republic of)
Young-Jun Jin, Chungju National Univ. (Korea, Republic of)


Published in SPIE Proceedings Vol. 7584:
Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
Hiroyuki Niino; Michel Meunier; Bo Gu; Guido Hennig; Jan J. Dubowski, Editor(s)

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