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Proceedings Paper

1-dimension nano-material-based flexible device
Author(s): Xing Yang; Zhaoying Zhou
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Paper Abstract

1D nano-material-based flexible devices has attracted considerable attention owing to the growing need of the high-sensitivity flexible sensor, portable consumer electronics etc.. In this paper, the 1D nano-materials-based flexible device on polyimide substrate was proposed. The bottom-up and top-down combined process were used for constructing the ZnO nanowire and the CNT-based flexible devices. Their electrical characteristics were also investigated. The measurement results demonstrate that the flexible device covered with a layer of Al2O3 has good ohm electrical contact behavior between the nano-material and micro-electrodes. The proposed 1D nano-material-based flexible device shows the application potential in the sensing fields.

Paper Details

Date Published: 20 November 2009
PDF: 6 pages
Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 75100K (20 November 2009); doi: 10.1117/12.839864
Show Author Affiliations
Xing Yang, Tsinghua Univ. (China)
State Key Lab. of Transducer Technology (China)
Zhaoying Zhou, Tsinghua Univ. (China)


Published in SPIE Proceedings Vol. 7510:
2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
Zhaoying Zhou; Toshio Fukuda; Helmut Seidel; Xinxin Li; Haixia Zhang; Tianhong Cui, Editor(s)

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