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Proceedings Paper

Research on transparent conductive AZO film fabricated by PECVD method
Author(s): Zhaoquan Chen; Minghai Liu; Yuping Liu; Peng Hu; Liang Tang; Xiwei Hu
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Paper Abstract

In this paper, AZO (ZnO:Al) polycrystalline thin films is produced with strong adhesion to the substrate, which deposit on the glass substrate by PECVD (plasma enhanced chemical vapor deposition) method. The film with the sheet resistance as low as 89Ω/(see manuscript), and with transmittance as high as 85% in visible light spans has been obtain. The measurements of the film structure and the experiments to examine the influence of the film electro-optical property have been shown. This AZO film fabricated by PECVD method is a useful attempt, and the results are very important to the choice of actual process of the solar cell.

Paper Details

Date Published: 13 October 2009
PDF: 12 pages
Proc. SPIE 7518, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies, 75180X (13 October 2009); doi: 10.1117/12.839857
Show Author Affiliations
Zhaoquan Chen, Huazhong Univ. of Science and Technology (China)
Minghai Liu, Huazhong Univ. of Science and Technology (China)
Yuping Liu, Huazhong Univ. of Science and Technology (China)
Peng Hu, Huazhong Univ. of Science and Technology (China)
Liang Tang, Huazhong Univ. of Science and Technology (China)
Xiwei Hu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 7518:
Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information Display Technologies
Michael Grätzel; Hiroshi Amano; Chin Hsin Chen; Changqing Chen; Peng Wang, Editor(s)

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