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Proceedings Paper

An optical scan-calibration system in scanning near-field optical microscopy
Author(s): Yunliang Wu; Hao Zhang; Keyi Wang
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Paper Abstract

Scanning Probe Microscopes(SPM) use piezoelectric actuators to generate the scans. But the nonlinearities inherent in the piezoelectric actuators limit the usefulness of the instruments in precision metrology. This paper describes a simple optical beam displacement sensor that is used to accurately measure the (x,y) position of a piezoelectric tube scanner used in Scanning Near-field Optical Microscope(SNOM). As the nonlinearities is too complex to make up a simple math model, this paper use the Artificial neural network to Calibrate the nonlinearities.

Paper Details

Date Published: 1 December 2009
PDF: 6 pages
Proc. SPIE 7506, 2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments, 75062P (1 December 2009); doi: 10.1117/12.839647
Show Author Affiliations
Yunliang Wu, Univ. of Science and Technology of China (China)
Hao Zhang, Univ. of Science and Technology of China (China)
Keyi Wang, Univ. of Science and Technology of China (China)


Published in SPIE Proceedings Vol. 7506:
2009 International Conference on Optical Instruments and Technology: Optical Systems and Modern Optoelectronic Instruments
Yongtian Wang; Yunlong Sheng; Kimio Tatsuno, Editor(s)

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