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Proceedings Paper

Temporal phase shifting method using acoustic-optic modulated stroboscopic interferometer (AOMSI) for characterization of microstructures
Author(s): Davoud Mohammadalizadeh; Muthukumaran Packirisamy; Narayanswamy Sivakumar
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Paper Abstract

Temporal phase shifting method, which is commonly used for characterization of the microstructures, requiring phaseshifter has inherent errors due to non-linearity. To overcome this, an Acoustic-Optic Modulated Stroboscopic Interferometer (AOMSI) was developed using the principle of Stroboscopic Interferometer. The technique utilizes the advantage of stroboscopy to create phase shifted images without requiring any component for phase shifting. Using Carré algorithm and developed AOMSI the curvature of microstructures due to residual stress was extracted. Experiments were performed on a silicon wafer to demonstrate the feasibility of the presented technique. Further, experiments were performed on a designed micro cantilever to extract surface-height information using the proposed method. To verify the accuracy of the presented method, the same micro cantilever was characterized using a WYKO surface profiler and the comparison was found to be in good agreement.

Paper Details

Date Published: 4 August 2009
PDF: 9 pages
Proc. SPIE 7386, Photonics North 2009, 73861I (4 August 2009); doi: 10.1117/12.839522
Show Author Affiliations
Davoud Mohammadalizadeh, Concordia Univ. (Canada)
Muthukumaran Packirisamy, Concordia Univ. (Canada)
Narayanswamy Sivakumar, Concordia Univ. (Canada)

Published in SPIE Proceedings Vol. 7386:
Photonics North 2009
Réal Vallée, Editor(s)

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